Shanghai Chengwei Semiconductor Equipment Co., Ltd.
Shanghai, China, Sept. 15, 2026 (GLOBE NEWSWIRE) — Shanghai Chengwei Semiconductor Equipment Co., Ltd. (CWSC), a provider of ultra-high purity fluid engineering systems, today announced a production capacity expansion for its automated chemical and slurry delivery systems. The company has scaled manufacturing within its 4,000-square-meter facility in the Songjiang District, specifically utilizing its Class 100 cleanroom space to increase the production of Bulk Chemical Delivery Systems (BCDS) and Slurry Delivery Systems (SDS). The expansion is designed to address fluid purity and processing requirements for semiconductor fabrication lines.
As manufacturing processes like chemical mechanical planarization (CMP), wet etching, and advanced cleaning grow more complex, sub-fab distribution loops require higher precision. Shanghai Chengwei’s BCDS manages continuous chemical dosing from centralized repositories directly to point-of-use tools. Constructed with 316L VIM/VAR electropolished stainless steel and fluoropolymer lines, the system is engineered to mitigate molecular contamination and handle corrosive, high-flow materials. The architecture includes modular valve manifold boxes with integrated pneumatic control loops for automated monitoring and reduced manual handling of reagents.
Simultaneously, the company has updated its SDS architecture to manage nano-abrasive suspensions during CMP processes. Structural variations or slurry agglomeration can result in micro-scratches on silicon wafers during production. To maintain aggregate homogeneity, the SDS incorporates low-shear, continuous-recirculation pump loops and filtration systems. This design minimizes dead legs and limits particle settlement and shear-induced coagulation to stabilize material removal rates across the wafer surface.
“Our expanded cleanroom infrastructure allows for system assembly under controlled particulate conditions,” stated James Yuan, Chief Technology Officer at Shanghai Chengwei. “By integrating sensor networks into both our Bulk Chemical Delivery and Slurry Delivery systems, we intend to help fabrication facilities manage micro-contamination risks associated with aggressive chemistries and abrasives to protect operational yields.”
Safety parameters are integrated into the equipment designs. Both the BCDS and SDS feature dual-containment coaxial piping, continuous exhaust monitoring, and multi-point infrared leak detectors connected to automatic excess flow shut-off valves. These safety mechanisms isolate pressure fluctuations or fluid breaches to protect facility personnel and machinery.
With this production milestone, Shanghai Chengwei aims to support manufacturing lines within the global semiconductor, printed circuit board, and advanced flat-panel display industries.
About Shanghai Chengwei Semiconductor Equipment Co., Ltd.
Shanghai Chengwei Semiconductor Equipment Co., Ltd. (CWSC) is a specialized supplier of ultra-high purity gas and chemical delivery systems, including Gas Cabinets, Chemical Delivery Modules, Valve Manifold Boxes, and Slurry Systems, serving semiconductors and advanced manufacturing industries.
Founded in September 2025 in Shanghai’s Songjiang District, Shanghai Chengwei Semiconductor Equipment Co., Ltd. focuses on the design, engineering, and manufacturing of ultra-high purity gas, chemical, and slurry delivery infrastructure. The company supplies high-precision fluid delivery systems to the semiconductor, display, solar, and optoelectronics sectors. Its product portfolio is engineered to support substrate treatment processes, manage contaminant footprints, and align with industrial production safety standards.
Website: https://www.chengweisemi.com/
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- Shanghai Chengwei Semiconductor Equipment Co., Ltd.
CONTACT: James Yuan Shanghai Chengwei Semiconductor Equipment Co., Ltd [email protected] +8613380377051
